Synergistic Effect of Deposition Temperature and Substrate Bias on Structural, Mechanical, Stability and Adhesion of TiN Thin Film Prepared by Reactive HiPIMS
CERAMICS INTERNATIONAL（2024）
关键词
Titanium nitride,HiPIMS,Bias voltage,Microstructure,Hardness,Adhesion
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要