Spatially Resolved Conductivity of Rectangular Interconnects considering Surface Scattering – Part I: Physical Modeling
arxiv(2024)
摘要
Accurate modeling of interconnect conductivity is important for performance
evaluation of chips in advanced technologies. Surface scattering in
interconnects is usually treated by using Fuchs-Sondheimer (FS) approach. While
the FS model offer explicit inclusion of the physical parameters, it lacks
spatial dependence of conductivity across the interconnect cross-section. To
capture the space-dependency of conductivity, an empirical modeling approach
based on "cosh" function has been proposed, but it lacks physical insights. In
this work, we present a 2D spatially resolved FS (SRFS) model for rectangular
interconnects derived from the Boltzmann transport equations. The proposed SRFS
model for surface scattering offers both spatial dependence and explicit
relation of conductivity to physical parameters such as mean free path and
specularity of electrons and interconnect geometry. We highlight the importance
of physics-based spatially resolved conductivity model by showing the
differences in the spatial profiles between the proposed physical approach and
the previous empirical approach. In Part II of this work, we build upon the
SRFS approach to propose a compact model for spatially-resolved conductivity
accounting for surface scattering in rectangular interconnects.
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