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Hybrid Integration of Magnetoresistive Sensors with MEMS As a Strategy to Detect Ultra-Low Magnetic Fields.

Joao Valadeiro,Susana Cardoso,Rita Macedo,Andre Guedes,Joao Gaspar,Paulo P. Freitas

Micromachines（2016）

Cited 34|Views1
Key words
magnetoresistive sensors,noise,MEMS,hybrid devices,frequency modulation,magnetic field detection
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