Epitaxial Polysilicon MEMS Temperature Sensor with 0.043 °C Resolution at 4-Hz Data Rate
IEEE Sensors Journal（2024）
Key words
Microelectromechanical systems (MEMS),polysilicon,resonators,temperature sensor
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined