The Role of Carrier Injection in the Breakdown Mechanism of Amorphous Al2O3 Layers

P. La Torraca,A. Padovani, J. Strand,A. Shluger,L. Larcher

IEEE ELECTRON DEVICE LETTERS（2024）

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关键词

Degradation,Discrete Fourier transforms,Electric fields,Electron traps,Solid modeling,Software,Permittivity,Amorphous alumina,atomic defects,breakdown,carrier injection,high-k dielectric

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