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Correction: Integrated silicon photonic MEMS

Niels Quack,Alain Yuji Takabayashi,Hamed Sattari,Pierre Edinger,Gaehun Jo,Simon J. Bleiker,Carlos Errando-Herranz,Kristinn B. Gylfason,Frank Niklaus,Umar Khan,Peter Verheyen,Arun Kumar Mallik,Jun Su Lee,Moises Jezzini,Iman Zand,Padraic Morrissey,Cleitus Antony,Peter O’Brien,Wim Bogaerts

Microsystems & Nanoengineering（2024）

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[This corrects the article DOI: 10.1038/s41378-023-00498-z.].
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