Low Profile Triangle-Shaped Piezoelectric Rotary Motor

MICROMACHINES(2024)

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摘要
In this paper, we present research on a novel low-profile piezoelectric rotary motor with a triangle-shaped stator. The stator of the motor comprises three interconnected piezoelectric bimorph plates forming an equilateral triangle. Bimorph plates consist of a passive layer fabricated from stainless steel and four piezo ceramic plates glued to the upper and lower surfaces. Furthermore, spherical contacts are positioned on each bimorph plate at an offset from the plate's center. Vibrations from the stator are induced by a single sawtooth-type electric signal while the frequency of the excitation signal is close to the resonant frequency of the second out-of-plane bending mode of the bimorph plate. The offset of the spherical contacts allows for a half-elliptical motion trajectory. By contrast, the forward and backward motion velocities of the contacts differ due to the asymmetrical excitation signal. The inertial principle of the motor and the angular motion of the rotor were obtained. Numerical and experimental investigations showed that the motor operates at a frequency of 21.18 kHz and achieves a maximum angular speed of 118 RPM at a voltage of 200 Vp-p. Additionally, an output torque of 18.3 mN center dot mm was obtained under the same voltage. The ratio between motor torque and weight is 36 mN center dot mm/g, while the ratio of angular speed and weight is 28.09 RPM/g.
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关键词
piezoelectric motor,angular motion,inertial operation principle,low-profile motor
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