Atomic Data for Low Temperature Mid-Z Elements for Lithography ApplicationsAmanda Neukirch,D. P. Kilcrease,P. Hakel,Christopher J. Fontes,M. E. Sherrill,J. ColganBulletin of the American Physical Society(2019)引用 23|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要