Growth and characterization of AlInN/GaN superlattices

•AlInN/GaN superlattices (SLs) have superior morphology to thick AlInN layers.•AlInN/GaN SLs suppress the crystal degradation and defects observed in AlInN layers.•AlInN/GaN SLs on GaN substrates exhibit nearly perfect steplike morphology.•AlInN/GaN SLs emit light from quantum states within the thin GaN layers (∼317 nm)