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Mirrorless MEMS Imaging: a Nonlinear Vibrational Approach Utilizing Aerosol-Jetted PZT-actuated Fiber MEMS Scanner for Microscale Illumination

Wei-Chih Wang, Ming-Yao Li, Kuan-Chang Peng, Yi-Feng Hsu,Benjamin Estroff, Pao-Yun Yen,David Schipf,Wen-Jong Wu

Microsystems & Nanoengineering(2024)

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