Measuring Method of Dielectric Plates Microwave Parameters in X-Band

In the present study, we investigated the use of a split-cylinder resonator and a slot line-based planar sensor for precise measurement. The dielectric wafer parameters had a thickness of millimeters and dielectric constants of ones to tens at a frequency of about 10 GHz. The resonant frequency, sensitivity, and inclusion coefficient were calculated for a split-cylinder resonator with a half-length L=16 mm and a radius a=20 mm for various thicknesses of dielectric wafers. The express monitoring method was based on a microstrip line coupled to a split-ring slot-line resonator formed in the ground. To avoid the measurement error caused by an uncontrolled air gap between the sensor and the sample, this air gap was introduced into the calculation model. The model was developed using conformal mapping and the partial capacitance method. The resonant frequency of the slotline resonator was estimated from the capacitances of the slotline-sample structure with and without a dielectric. The resonant frequency and sensitivity of the sensor were calculated depending on the dielectric constant of the sample and the gap widths of the slot.