High-Speed Operation at 25ns Enabled by Angstrom Layer HZO Technology in MFS IGZO Device with Ultra-Wide Memory Window and Low Thermal Budget

CHENG- RUI LIU, SHENG-MIN WANG, YU-TING CHEN, SHAO-CHEN LEE,YING-TSAN TANG

Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials(2023)

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