Reactive Vapor-Phase Inhibitors for Area-Selective Depositions at Tunable Critical Dimensions.

Lawal Adewale Ogunfowora,Ishwar Singh,Noel Arellano,Thomas G. Pattison,Teddie Magbitang, Khanh Nguyen,Brandi Ransom,Krystelle Lionti,Son Nguyen, Teya Topura,Eugene Delenia,Mark Sherwood,Brett M. Savoie,Rudy Wojtecki

ACS APPLIED MATERIALS & INTERFACES（2024）

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关键词

area-selective depositions,atomic layer deposition,small molecule inhibitors,self-aligned fabrication,chemoselective inhibition,density functional theory

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