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Conformal Growth of GaP on High Aspect Ratio Si Structured Surface Via Plasma-Enhanced Atomic Layer Deposition

Alexander Uvarov,Alexander Gudovskikh,Artem Baranov,Alina Maksimova,Ekaterina Vyacheslavova,Demid Kirilenko

Surface and Coatings Technology（2023）

Cited 1|Views18
Key words
PEALD,Silicon nanowires,Gallium phosphide,Conformal deposition,TEM
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