Design and Fabrication of Nanofibrous membrane and Microelectrodes for highly robust biocompatible humidity sensing.

2023 International Conference on Microelectronics (ICM)(2023)

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Abstract
This study reports the fabrication of a self-sensing humidity sensor based on a nanofibrous membrane and microelectrodes (comb-shaped). Unlike the conventional approach, where separate substrates are used for mechanical support of the electrodes, we have proposed a membrane based on polylactic glycolic acid (PLGA) that serves both objectives; sensing humidity with full range $(0 \%-100 \% \mathrm{RH})$ and also providing mechanical support to the electrodes with minimum compromise over the flexibility of the sensor. Various electrical and surface characterizations were also performed. The asdeveloped sensor showed excellent response and recovery time (1.8 s and $4.3 \mathrm{~s}$, respectively), sensitivity, and ability to distinguish between different breathing styles when practically used with volunteer subjects.
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Key words
Nanofibrous membrane,microelectrodes,humidity sensor,wearable monitoring
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