Design of UTC- PD With Nanoscale Optical Microstructures
2023 Asia Communications and Photonics Conference/2023 International Photonics and Optoelectronics Meetings (ACP/POEM)(2023)
摘要
In this article, we report a uni-traveling-carrier photodiode (UTC-PD) incorporating nanoscale optical microstructures. We design a waveguide containing scattering structure for the UTC-PD to convert incident light from vertical incidence to lateral propagation and to constrain the scattered light within the absorption layer of the UTC-PD. In this way, the proposed UTC-PD can have an operating performance like that of a waveguide type PD under vertical light incidence, and its responsivity will increase. The ideal responsivity of the designed UTC-PD with 200nm thick absorption layer after optimization can reach 0.33A/W, which is 50% higher than that without a scattering structure.
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关键词
Nanoscale optical microstructures,particle scattering,waveguide structure,UTC-PD with a diameter of 20 μm
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