PZT micro-transfer printing for photonic MEMS

I. Ansari, K. De Geest, J. De Witte, T. Vandekerckhove, H. Rijckaert, E. Picavet, E. Lievens, G. F. Feutmba, T. Van de Veire, B. Kuyken, J. Beeckman, D. Van Thourhout

2023 IEEE PHOTONICS CONFERENCE, IPC（2023）

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摘要

This paper demonstrates micro-transfer printing of a photonics-compatible lead zirconate titanate (PZT) film. The PZT coupons were released by etching the underlying SiO2 layer with HF vapor and successfully transferred onto a Si substrate. This technique enables the realization of piezo-MEMS for photonics applications.

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关键词

PZT,MEMS,PIC,Piezoelectric,Si photonics

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