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Refractive Index Modification in Thin Film Barium Titanate-on-Insulator and Dry Etch Free Fabrication of Waveguide Devices

Yu Cao,Hong-Lin Lin,Haidong Liang,Andrew Bettiol,Elhadj Dogheche,Aaron Danner

2023 IEEE PHOTONICS CONFERENCE, IPC（2023）

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Abstract
We present refractive index modification methods in thin-film barium titanate-on-insulator with a resultant index change up to 0.17, and propose dry etch free device fabrication methods for optical waveguide devices.
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Key words
barium titanate-on-insulator,refractive index modification,etch free fabrication
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