Large-Scale Atomistic Simulation of the Structure of ZnO Films

F. V. Grigoriev,V. B. Sulimov,A. V. Tikhonravov

Lobachevskii Journal of Mathematics（2023）

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摘要

The model of large-scale molecular dynamics simulation of the deposition of the ZnO films is developed. The dependence of the films structure on the deposition angle is studied for the case of high-energy deposition. The formation of nanostructured films at large deposition angle is demonstrated. The numerical efficiency of the model is discussed.

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关键词

high-performance modeling,molecular dynamics,nanostructured films,computational efficiency,glancing angle deposition,GLAD

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