Electron Beam-Stimulated Luminescence of Helium Ion-Irradiated Hexagonal Boron Nitride

The impact of irradiation with a focused helium ion beam and an electron beam on the cathodoluminescence (CL) of hexagonal boron nitride was investigated. It was shown that the irradiation with helium ions resulted in a decrease in the intensity of CL in the region of 200–700 nm. Subsequent irradiation with electrons results in an increase in the intensity of the 2 eV CL band compared with its intensity in pristine material.