Synthesis and Study of High-Performance Ferroelectric Materials for Advanced Non-Volatile Memory Devices

Sergei Khakhomov,Alina Semchenko, Larisa Sudnik,Dmitry Kovalenko, Vladimir Gaisun, Andrei Boiko, Alexander Maevsky, Konstantin Danilchenko, Vladimir Pilipenko, Dmitry Belorusov,Galina Chucheva

2023 7th International Conference on Information, Control, and Communication Technologies (ICCT)（2023）

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摘要

Sol-gel films BaxSrl-xTi03 (x = 0,8; 0, 9; 1) were obtained, the dependences of their properties on the parameters of the sol-gel process were determined. The research results allow us to propose ferroelectric structures for use in DRAM devicesof thin sol-gel films.

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关键词

sol-gel films,AFM,SEM,polarization,DRAM

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