Toroidal Dipole All-Dielectric Metasurfaces with High Sensitivity, High Figure of Merit, and Robustness for Refractive Index Sensing
Journal of electronic materials(2023)
摘要
Refractive index sensing is of great significance in biological detection. Especially, all-dielectric metasurfaces can greatly improve the sensitivity of biological detection. However, the Q factor and electric field enhancement of most metasurfaces are generally low, resulting in low sensitivity and figure of merit (FOM). Meanwhile, fabrication tolerances may result in inability to achieve high-performance refractive index sensing. Here, we use finite element method (FEM) simulation to design a conical hole structure on an all-dielectric metasurface. The toroidal dipole resonance based on a conical hole structure can achieve a large-area electric field enhancement and a high Q factor, thereby achieving a sensitivity of 540 nm/RIU and FOM of 154.3. Meanwhile, considering the real fabrication tolerance, the proposed structure can still achieve high-sensitivity sensing when the conical hole structure changes the ellipsoidal structure. Therefore, the high sensitivity, high FOM, and robustness of the proposed structure make it highly significant for practical applications.
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关键词
Metasurfaces,toroidal dipole,high sensitivity,robustness,refractive index sensing
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