Analysis Native Oxide Formation Kinetics in Nanometer-Scale NbTiN Thin Films
2023 IEEE Nanotechnology Materials and Devices Conference (NMDC)(2023)
Abstract
Comprehensive characterization techniques are applied to investigate the kinetics of native oxide formation on nanometer-scale films of NbTiN deposited using a physical vapor deposition process on silicon substrates coated with silicon nitride.
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Key words
NbTiN,physical vapor deposition,native oxide,X-ray photoelectron spectroscopy,X-ray reflection,X-ray fluorescence,X-ray diffraction,atomic force microscopy
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