Preparation of palladium-based catalyst by plasma-assisted atomic layer deposition and its applications in CO2 hydrogenation reduction

Abstract Supported Pd catalyst is an important noble metal material in recent years due to its high catalytic performance in CO 2 hydrogenation. An fluidized-bed plasma assisted atomic layer deposition (FP-ALD) process is reported to fabricate Pd nanoparticle catalyst over γ-Al 2 O 3 or Fe 2 O 3 /γ-Al 2 O 3 support, using palladium hexafluoroacetylacetonate as the Pd precursor and H 2 plasma as counter-reactant. Scanning transmission electron microscopy exhibits that high-density Pd nanoparticles are uniformly dispersed over Fe 2 O 3 /γ-Al 2 O 3 support with an average diameter of 4.4 nm. The deposited Pd-Fe 2 O 3 /γ-Al 2 O 3 shows excellent catalytic performance for CO 2 hydrogenation in a dielectric barrier discharge reactor. Under a typical condition of H 2 to CO 2 ratio of 4 in the feed gas, the discharge power of 19.4 W, and gas hourly space velocity of 10000 h − 1 , the conversion of CO 2 is as high as 16.3% with CH 3 OH and CH 4 selectivities of 26.5% and 3.9%, respectively.