Some considerations in nanoindentation measurement and analysis by atomic force microscopy
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A(2023)
Abstract
Atomic force microscopy is highly suited for characterizing morphology and physical properties of nanoscale objects. The application of this technique to nanomechanical studies is, therefore, exploited in a wide range of fields from life sciences to materials science and from miniature devices to sensors. Although performing a mechanical measurement can be straightforward and accessible to novice users, obtaining meaningful results requires knowledge and experience not always evident in standard instrumental software modules. In this paper, we provide a basic guide to proper protocols for the measurement and analysis of force curves and related atomic force microscopic techniques. Looking forward, we also survey the budding application of machine learning in this discipline.(c) 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license
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