Precisely Controlled Batch-Fabrication of Highly Sensitive Co-Resonant Cantilever Sensors from Silicon-Nitride
JOURNAL OF MICROMECHANICS AND MICROENGINEERING（2024）
关键词
cantilever sensors,batch-fabrication,microfabrication,co-resonant sensitivity enhancement,geometric eigenfrequency matching,microcantilever and high aspect ratio nanocantilever,silicon nitride MEMS
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