Theoretical Insights into the Solubility Polarity Switch of Metal–Organic Nanoclusters for Nanoscale Patterning (Small Methods 10/2023)

Front Cover In article number 2300309, Ekinci, Xu, He, and co-workers obtained the classic ZrO2-nanoparticle photoresist as single crystals by controlled synthesis, based on which the patterning mechanisms were investigated by characterizations and theoretical calculations, including photoacid-induced polarity changes and radical polymerization reactions under high-energy radiation. This work reveals the origin of the sensitivity of this typical nanoparticle photoresist and provides new perspectives for future photoresist design.