Enhanced pseudo-atomic layer deposition of antimony telluride thin films by co-injecting NH₃ gas with both precursors

Sangmin Jeon,Jeong Woo Jeon, Wan Choi,Byongwoo Park,Gwangsik Jeon,Chanyoung Yoo,Cheol Seong Hwang

Journal of Materials Chemistry C（2023）

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摘要

This work proposed an enhanced deposition method of antimony telluride (Sb 2 Te 3 ) thin films, which allowed facile growth at high temperatures (> 150 °C).

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关键词

telluride thin films,thin films,antimony,pseudo-atomic,co-injecting

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Enhanced pseudo-atomic layer deposition of antimony telluride thin films by co-injecting NH3 gas with both precursors

Enhanced pseudo-atomic layer deposition of antimony telluride thin films by co-injecting NH₃ gas with both precursors