Vector piezoelectric response and ferroelectric domain formation in Hf_0.5Zr_0.5O₂ films

The evolution of the vector piezoelectric response of Hf 0.5 Zr 0.5 O 2 films on SrTiO 3 substrates with different orientations shows the large and anisotropic in-plane piezoelectric response in films grown on SrTiO 3 (110).