Precise material microprocessing by high-power diffraction limited laser radiation in middle infrared spectral range

Abstract Diffraction-limited laser radiation with a record-high total average output power exceeding 14 W is obtained in the middle infrared spectral region through a new improved master oscillator – power amplifier system based on the strontium vapor laser. Precise microprocessing of optical grade fused quartz, sapphire, stainless steel, hard biological tissues, and polymers is also accomplished. Using a parabolic mirror for the laser beam focusing, spherical aberrations are overcome and a crater diameter and a channel width of the order of the laser wavelength are achieved.