Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water

Yoïchi Tanaka, Nobuko Gan, Yuko Ogawa, Hideaki Iino, Ren Jie Chang, Suvidyakumar Homkar, Giuseppe Alessio Verni, M. E. Givens, Ju Geng Lai,Antoine Pacco, S. Brus,Hiroaki Arimura, Yusuke Oniki,Efraín Altamirano-Sánchez,Frank Holsteyns,Naoto Horiguchi

Solid State Phenomena（2023）

引用 0|浏览1

暂无评分

摘要

This paper focuses on the mechanism and methodology of the dissolution of Alternative Dipole Material (ADM) and its inhibition through the use of functional waters. The study investigates the etching behavior of ADM in different solutions, examines the surface state of ADM before and after cleaning, and evaluates the impact of the functional water process on its electrical properties.

查看译文

关键词

dipole,ph,water

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要