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Progress on Ultrafast Laser Lithography of Large-Scale Lithium Niobate Integrated Photonics

Jinxin Huang,Jinming Chen,Zhaoxiang Liu,Lvbin Song,Guanhua Wang,Chao Sun,Rongbo Wu,Jintian Lin,Zhiwei Fang,Haisu Zhang,Zhe Wang,Jia Qi,Min Wang,Ya Cheng

CHINESE SCIENCE BULLETIN-CHINESE（2024）

引用 1|浏览17
关键词
thin film lithium niobate,photonic integrated circuit,photolithography,femtosecond laser micromachining
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