Fabrication Methods for Bio-MEMS

MEMS is the exotic relatives of semiconductors and integrated circuits (ICs), originally based on silicon wafer production processes but with the dimensions of space, flexion, and constantly varying output akin to analogue devices. Whereas BioMEMS refers to all interfaces and cross-sections of biological sciences and therapeutic disciplines with microsystems and nanotechnology, commercial microfluidic devices rely heavily on material selection and production techniques. Molding, replication, casting, and bonding procedures are being developed that is required for mass production with repeatability and functional dependability at a low cost, better design freedom, and manufacturing ease, which is critical in the medical disposable industry. Nowadays, BioMEMSs are the largest and most diversified applications of MEMS devices. Fabrication processes employed many steps process like wafer selection, lithography, etching, and substrate binding. Furthermore, packaging for safety and biocompatibility is a major problem for the BioMEMS engineer.