���バネッセント光を用いたナノスケール洗浄現象の可視化に関する研究

We report the instantaneous physical evidence of detachment of residual φ80 nm Au particle due to the cavitation effect approaching during enforcing 1.1 MHz waves, which was clarified by using both of evanescent light field and dark field with duplicated the non-contact cleaning process of the surface to be cleaned.