Modelling of electron energy-loss spectroscopy detection limits
CRC Press eBooks(2022)
Abstract
We develop the methodology to predict spectral signal-to-noise ratios (SNRs) of electron energy-loss spectroscopy (EELS) by computing spectra taking account of valence electron excitations, inner-shell excitations and elastic scattering together with the noise characteristics of the detection system. The consideration of multiple scattering in our model allows us to apply it to a wide range of specimen thicknesses and collection angles. The detectability of an element is judged by the SNR. The calculated SNRs at the oxygen and magnesium K-edges in MgO agree well with experiment.
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Key words
spectroscopy,electron,energy-loss
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