Confocal micro-Raman spectroscopy study of phonon-plasmon modes in GaN structures for power devices

Jesus Ortiga-Fibla,Frank Brunner,Eldad Bahat Treidel,Nuria Garro,Oliver Hilt,Ana Cros

2023 14th Spanish Conference on Electron Devices (CDE)（2023）

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摘要

Confocal micro-Raman spectroscopy is presented as a non-invasive tool to address different material properties of semiconductors for power devices. In the present work, the quantification of carrier concentration and mobility are addressed by studying the evolution of different phonon modes and their coupling with the plasmon.

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关键词

Confocal micro-Raman spectroscopy,phonon-plasmon coupling,transport properties,GaN,vertical GaN devices

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