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円筒形スパッタリング陰極の磁場最適化とその高電力放電特性研究【JST・京大機械翻訳】

Li Tijun,Cui Suihan,Liangliang Liu, Xiaoyuan Li,Wu Zhongcan,Ma Zhengyong,Fu Jinyu, Tian Xia,Zhu Jianhao,Zhongzhen Wu

Wuli Xuebao（2021）

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