ALD-Based NbTiN Studies for SIS R&D
12th International Particle Accelerator Conference (IPAC'21), Campinas, SP, Brazil, 24-28 May 2021（2021）
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nbtin studies,ald-based
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12th International Particle Accelerator Conference (IPAC'21), Campinas, SP, Brazil, 24-28 May 2021（2021）