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Tribological glazing evolution of fixed abrasive pad under different polishing solution conditions

INDUSTRIAL LUBRICATION AND TRIBOLOGY(2024)

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Abstract
PurposeThis study aims to clarify the influence mechanism of polishing solution type on the glazing evolution of fixed abrasive pad under different interfacial pressure conditions.Design/methodology/approachThe tribological experiments were carried out on the friction and wear machinery with W3-5 diamond fixed abrasive pad and quartz glass workpiece under three polishing solution types of five pressure conditions. The changes of surface morphology, porosity and hardness of fixed abrasive pad were detected by white light interferometer, optical microscope and shore hardness tester.FindingsThe results showed that the glazed phenomenon of fixed abrasive pad is occurred after a certain time, which is more obvious with the increasing of interfacial pressures. The polishing solution type has a significant effect on the glazing time, although the glazed phenomenon is inevitable. The mechanism of it is that the micro-convex peaks on the surface of the fixed abrasive pad are easily wear, and the pores are blocked by the accumulation of waste debris generated during the experiment process. Thus, a smooth and high-density hard layer is formed on the surface of the fixed abrasive pad which induces the decreasing of the friction coefficient and surface roughness value. For selected polishing solution types, the wear rate of micro-convex peaks is different due to the corrosion action difference with polishing pad surface.Originality/valueThe main contribution of this work is to provide a new investigating method for further understanding the glazing evolution mechanism of fixed abrasive pad.Peer reviewThe peer review history for this article is available at: https://publons.com/publon/10.1108/ILT-08-2023-0257/
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Key words
Chemical mechanical polishing,Glazing evolution,Fixed abrasive pad,Polishing solution
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