Study on a differential pressure microflow sensor on microfluidic chip
MEASUREMENT（2023）
Abstract
•A new micro flow sensor based on microfluidic chip is proposed.•Graphene film is used as the pressure sensitive structure to measure pressure.•Differential pressure in micro channel is converted to differential optical power.•The mechanism model of micro flow sensor is established and verified.•Sample of micro flow sensor fabricated could accurately measure the flow rates.
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Key words
Microfluidics,Micro channel,Micro flow measurement,Differential pressure,Graphene film
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