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High-accuracy circuits on fibrous materials for flexible tension sensor

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS(2023)

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Abstract
Fibrous-based flexible circuits represent a convergence of electronics and textiles, offering innovative solutions for wearable technology and smart textiles for electronic communications. The challenge, however, with the fabrication of flex circuits, is the limited techniques for creating flexible circuits on fibrous substrates, which makes it particularly difficult to meet high-accuracy demand. Herein, we facilely fabricate flexible circuits on fibrous-based substrates via magnetron sputtering technology with patterned templates. It is impressive that high conductive, stable, and wear-resistant high-precision circuits were successfully fabricated in a linewidth less than 100 μm. The fabricated copper circuit exhibits superior resistivity of 3.41 × 10 –6 Ω·m and endows superior strain sensing performance with excellent durability under repeated abrasion and bending tests. Our work provides an innovative manufacturing approach for the fabrication of high-accuracy circuits on fibrous substrates for wearable electronics applications.
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Key words
flexible tension sensor,fibrous materials,high-accuracy
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