On the role of micro-porosity in affecting the environmental stability of atomic/molecular layer deposited (ZnO)_a(Zn–O–C₆H₄–O)_b films

Dalton Transactions（2019）

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摘要

Correlation between the porosity and environmental stability of Zn-based hybrid multilayer films is studied by means of ellipsometric porosimetry.

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On the role of micro-porosity in affecting the environmental stability of atomic/molecular layer deposited (ZnO)a(Zn–O–C6H4–O)b films