Structure, mechanical and tribological properties of Ta-xN coatings deposited by reactive HiTUS

This work investigates the structure, mechanical, and tribological properties of Ta-xN coatings deposited using reactive High Target Utilization Sputtering (HiTUS) with a focus on the role of tribological layers formed in the sliding contacts. The scanning electron microscopy, energy-dispersive X-ray spectroscopy, X-ray diffraction, and Raman spectroscopy observations revealed that the gradual increase of nitrogen flow results in the transition from textured fcc Ta structure (without nitrogen) toward mixed sub-stoichiometric Ta-Ny/Ta2N/amorphous structures up to near-stoichiometric fcc TaN coatings. The highest hardness HIT ∼37 GPa and indentation modulus EIT ∼375 GPa as well as the lowest coefficients of friction (COF) in the range 0.16–0.36 and wear rates around 3 × 10−7 mm2/N·m were obtained in the layer with Ta2N structure. The unique combination of low COF and high wear resistance combined with high hardness and stiffness were attributed to the shear sliding between Ta2O5-based transfer film in the wear track and pure alumina ball.