一様に侵食された円筒マグネトロンターゲットの粗さのin situ評価【Powered by NICT】 Muhammad Arif,Ernstbrunner Thomas,C. Eisenmenger‐SittnerVacuum(2017)Cited 23|Views0AI Read ScienceMust-Reading TreeExampleGenerate MRT to find the research sequence of this paperChat PaperSummary is being generated by the instructions you defined