TCAD simulation and radiation damage modeling for low gain avalanche detector

We report a precise TCAD simulation for low gain avalanche detector (LGAD) with calibration by secondary ion mass spectroscopy (SIMS). The radiation model - LGAD Radiation Damage Model (LRDM) combines local acceptor degeneration with global deep energy levels is proposed. The LRDM could predict the leakage current level and the behavior of capacitance for irradiated LGAD sensor at -30 $^{\circ}$C after irradiation fluence $\rm \Phi_{eq}=2.5 \times 10^{15} ~n_{eq}/cm^{2}$.