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High Performance Junctionless FDSOI SiGe Channel P-Finfet with High ION/IOFF Ratio and Excellent SS

Hongxiao Lin,Xing Zhao,Xue Luo,Yuanhao Miao,Yongkui Zhang,Zhenzhen Kong,Guilei Wang,Hong Yang,Zhenhua Wu,Yunfei Shi, Bin Lu,Linpeng Dong,Wenjuan Xiong,Renrong Liang,Jun Xu,Xuewei Zhao,Tianchun Ye,Henry H. Radamson

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING（2024）

引用 4|浏览53
关键词
FDSOI,FinFET,SiGe channel,Junctionless
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