Holey metalens focusing of extreme ultraviolet light

M. Ossiander,M.L. Meretska, H.K. Hampel, S.W.D. Lim, N. Knefz, T. Jauk, F. Capasso,M. Schultze

Optica Imaging Congress (3D, COSI, DH, FLatOptics, IS, pcAOP)（2023）

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摘要

Manipulating light in the extreme ultraviolet wavelength range is challenging due to a limited number of suitable optical materials. In this work, we demonstrate a silicon holey metalens to focus 50-nm wavelength light.

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