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Insight into Reactive Oxygen Plasma Characteristics and Reaction Mechanism on SRF Accelerator Plasma Cleaning

Tongtong Zhu,Yuan He,Teng Tan,Didi Luo,Qingwei Chu,Hongwei Zhao,Sheng Chen,Shichun Huang,Hao Guo,Ziqin Yang,Hongwen Cao,Bo Liu,Zongbiao Ye, Kun Zhang,Yihan Wang,Andong Wu

PLASMA SOURCES SCIENCE & TECHNOLOGY（2023）

引用 2|浏览23
关键词
SRF cavities,hydrocarbon,plasma cleaning,field emission
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