PSO-SVM Based Performance-Driving Scheduling Method for Semiconductor Manufacturing Systems

Featured Application This method is developed to solve the dynamic scheduling problem of semiconductor manufacturing processes and can be extended to most mechanical processing scenarios and resource scheduling scenarios.Abstract There are currently many studies on data-driven optimization scheduling, but only a few studies have combined "closed-loop optimization" with "performance-driven". Therefore, this research proposed a PSO-SVM-based (particle swarm optimization optimized support vector machine) scheduling method that reconciles the composite dispatching rules (CDR), performance-driving ideology, and feedback mechanism ideology. Firstly, the composite dispatching rules coalesce flexible equipment maintenance, multiple process constraints, and dynamic dispatching. Secondly, the performance-driving ideology is carried out through two learning models based on the PSO-SVM algorithm, based on targeted optimizing performances. Thirdly, the feedback mechanism ideology makes the scheduling method realize closed-loop optimizations adaptively. Finally, the superiority of the proposed scheduling method is validated in a semiconductor manufacturing system in China. Compared with CDR, the proposed scheduling method combines MOV, PR, and EU, respectively EU_ O, EU_ P, PCSR and ODR increased by 7.85%, 5.11%, 8.76%, 8.14%, 6.60%, and 7.33%, indicating the superiority of this method.