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High-Q Adiabatic Micro-Resonators on a Wafer-Scale Ion-Sliced 4H-Silicon Carbide-on-insulator Platform.

OPTICS LETTERS(2023)

Cited 1|Views12
Key words
Thin Film Resonators,Micromechanical Resonators,On-chip Interconnects,MEMS Resonators,High-Frequency Applications
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